ROLL-TO-ROLL SPUTTER APPARATUS FOR CARRYING OUT CONTINUOUS SPUTTERING, AND CONTINUOUS SPUTTERING METHOD

摘要

The technical features of the present invention are intended for a roll-to-roll sputter apparatus for carrying out continuous sputtering, in which a flexible substrate (211a) wound on an unwinder roll (210a) is unwound and transferred to a working area of a drum (220), and transferred to a winder roll (210b) after working, wherein the sputter apparatus comprises: a first sputter (230a) arranged on a first side around the drum (220) to sputter a transparent conductive oxide (TCO) material onto the flexible substrate (211a); a second sputter (230b) arranged on a second side around the drum (220) to sputter a metal material onto the flexible substrate (211a) and to thus form a permeation layer; and a third sputter (230c) arranged on a third side around the drum (220) to sputter a transparent conductive oxide (TCO) material onto the flexible substrate (211a).