PATTERN FORMING APPARATUS AND METHOD, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To achieve exposure with high precision even on a contracted sheet material.

SOLUTION: A pattern forming method is provided, which includes: restraining at least two positions of an elongated sheet S in the longitudinal direction to apply a tension in the longitudinal direction to a prescribed area SAiin the longitudinal direction; adsorbing and restraining both sides of the sheet material by a holder SH2in the width direction intersecting the longitudinal direction of the sheet material to apply a tension in the width direction to the prescribed area SAiin the width direction; allowing a backside portion corresponding to the prescribed area of the sheet material S to change in accordance with a flat reference surface while the tensions in the longitudinal direction and in the width direction are applied to the prescribed area; and the prescribed area of the flattened sheet material is irradiated with an energy beam to form a pattern.

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