| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressurizing and cooling treatment method capable of preventing generation of a defective product in view of the fact that when pressurizing or cooling gas supplied to a treated object after vacuum heating treatment has been completed contains moisture, the moisture adheres to the treated object, and a defect occurs in the treated object. SOLUTION: A temperature and a steam pressure of the gas supplied from a gas supply source during pressurizing or cooling an inside of a treatment chamber 24 is adjusted by a dew point adjusting means 14, and the dew point in the treatment chamber 24 is adjusted to be equal to or at least slightly lower than the dew point of the gas in a dry clean room when the gas is introduced into the chamber 24. COPYRIGHT: (C)2011,JPO&INPIT |
