| 摘要 |
PROBLEM TO BE SOLVED: To provide a screen printing machine which applies a compression force on a substrate in wall balance without depending on a size of the substrate and adequately corrects the warpage of the substrate before carrying out screen printing. SOLUTION: A warpage correction body 10 which is formed by installing a plurality of pressing members 33 to a base 32 is arranged above the substrate PB supported by a warpage member 14. The plurality of pressing members 33 of the warpage correction body 10, are arrayed in parallel to the warpage direction of the substrate PB (or the orthogonal direction to the warpage direction of the substrate PB) depending on the warpage member 14 and installed on the base 32 through a plurality of spring members 63, respectively. COPYRIGHT: (C)2011,JPO&INPIT
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