METHOD OF MANUFACTURING DEVICE, AND DEVICE

摘要

PROBLEM TO BE SOLVED: To prevent a functional film having a memory function etc., from deteriorating owing to water. SOLUTION: A method of manufacturing a device includes repeating, inside a deposition device: an insulating film-forming step of forming an insulating film on a substrate where the functional film is formed so as to cover the functional film; and a plasma-processing step of exposing a surface of the formed insulating film to plasma. COPYRIGHT: (C)2011,JPO&INPIT