| 摘要 |
PROBLEM TO BE SOLVED: To provide a cantilever of which probe can vertically approach a sample surface and which is especially suitable for observations and measurements of a structure having large irregularities and a deep groove structure and to provide a method for manufacturing the same. SOLUTION: The cantilever including both of a needle-like diamond formed on a diamond substrate through the use of thermochemical processing and a probe including a flat plate part provided integrally with the needle-like diamond includes a second needle-like diamond prepared by partially removing a side surface of the needle-like diamond. The second needle-like diamond is processed in such a way as to have an angleθof inclination, a mounting angle of the cantilever, to a line perpendicularly extending from a probe mounting surface of the cantilever. COPYRIGHT: (C)2011,JPO&INPIT
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