发明名称 METHOD FOR DICING WAFER AND PROCESS FOR MANUFACTURING LIQUID-DISCHARGING HEAD USING THE DICING METHOD
摘要 A method for dicing a wafer having a first face in which opening are arranged along dicing streets. The method includes a step of affixing a dicing tape to the first face such that the dicing tape lies over the openings and adhesive regions of the dicing tape are exposed in the openings and a step of treating the dicing tape to reduce the adhesive strength of the adhesive regions.
申请公布号 US2011027970(A1) 申请公布日期 2011.02.03
申请号 US20100904023 申请日期 2010.10.13
申请人 CANON KABUSHIKI KAISHA 发明人 IRI JUNICHIRO;KASHINO TOSHIO;INADA GENJI
分类号 H01L21/78;B41J2/16;H01L21/00 主分类号 H01L21/78
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