METHODS AND APPARATUS FOR PROCESS ABATEMENT WITH RECOVERY AND REUSE OF ABATEMENT EFFLUENT
摘要
<p>Methods and apparatus for recovering hydrogen fluoride (HF) are provided herein. In some embodiments, an apparatus includes a system for processing substrates, including a process chamber for processing a substrate; a fluorine generator coupled to the process chamber to provide fluorine (F2) thereto; an abatement system coupled to the process chamber to abate fluorine-containing effluents exhausted from the process chamber and to convert at least a portion of the fluorine-containing effluents into hydrogen fluoride (HF); an HF recovery system configured to at least one of collect, purify, or concentrate the HF converted by the abatement system; and a conduit for providing the recovered hydrogen fluoride (HF) to the fluorine generator or another application in the manufacturing process.</p>
申请公布号
WO2011014379(A1)
申请公布日期
2011.02.03
申请号
WO2010US42447
申请日期
2010.07.19
申请人
APPLIED MATERIALS, INC.;NEUBER, ANDREAS;CHANDLER, PHIL;STOW, CLIFFORD C.;CLARK, DANIEL O.;KIEFER, MICHAEL
发明人
NEUBER, ANDREAS;CHANDLER, PHIL;STOW, CLIFFORD C.;CLARK, DANIEL O.;KIEFER, MICHAEL