发明名称 METHOD FOR MANUFACTURING MAGNETIC RECORDING MEDIUM
摘要 A method for manufacturing a magnetic recording medium is provided which can sufficiently reduce variations in surface roughness even in the simultaneous presence of a region of a relatively wide concave and convex portion and a region of a relatively narrow concave and convex portion in the recording layer. The method includes the steps of etching a recording layer based on a (first) mask layer to process it in a concavo-convex pattern, and depositing a filler over the recording layer and the mask layer to fill a concave portion with the filler. In between those steps, provided is the step of removing part of the first mask layer over a recording element (a convex portion of the recording layer) by dry etching in which an etching rate for the mask layer is higher than that for the recording layer so that the mask layer remains over the recording element.
申请公布号 US2011024388(A1) 申请公布日期 2011.02.03
申请号 US20100842502 申请日期 2010.07.23
申请人 TDK CORPORATION 发明人 SUWA TAKAHIRO;FUKUZAWA NARUTOSHI;OKAWA SHUICHI;UCHIYAMA YOSHINORI
分类号 G11B5/84 主分类号 G11B5/84
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