发明名称 MANUFACTURING METHOD AND MANUFACTURING DEVICE FOR MANUFACTURING THIN FILM SOLAR CELLS
摘要 The invention relates to a manufacturing method and a manufacturing device for manufacturing thin film solar cells, whereby the method comprises a step of mounting a substrate (1) onto a heating plate (5), and a step of depositing a film (2) onto the substrate (1), wherein during the mounting step, a buffer layer (3) is placed between the heating plate (5) and a mounting surface (12) of the substrate (1 ), covering at least a middle region (121) of the substrate mounting surface (12).
申请公布号 WO2011012404(A2) 申请公布日期 2011.02.03
申请号 WO2010EP59502 申请日期 2010.07.02
申请人 SOLIBRO GMBH;DENG, YI;KUKLA, STEFAN;MOELLER, CARSTEN;HERRMANN, DIRK 发明人 DENG, YI;KUKLA, STEFAN;MOELLER, CARSTEN;HERRMANN, DIRK
分类号 H01L31/18 主分类号 H01L31/18
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