摘要 |
The invention relates to a manufacturing method and a manufacturing device for manufacturing thin film solar cells, whereby the method comprises a step of mounting a substrate (1) onto a heating plate (5), and a step of depositing a film (2) onto the substrate (1), wherein during the mounting step, a buffer layer (3) is placed between the heating plate (5) and a mounting surface (12) of the substrate (1 ), covering at least a middle region (121) of the substrate mounting surface (12). |
申请人 |
SOLIBRO GMBH;DENG, YI;KUKLA, STEFAN;MOELLER, CARSTEN;HERRMANN, DIRK |
发明人 |
DENG, YI;KUKLA, STEFAN;MOELLER, CARSTEN;HERRMANN, DIRK |