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发明名称
SUBSTRATE POLISHING APPARATUS
摘要
申请公布号
EP1633528(B1)
申请公布日期
2011.02.02
申请号
EP20040733975
申请日期
2004.05.19
申请人
EBARA CORPORATION;SHIMADZU CORPORATION
发明人
HIROKAWA, KAZUTO;KOBAYASHI, YOICHI;NAKAI, SHUNSUKE;OHTA, SHINROU;TSUKUDA, YASUO
分类号
B24B49/12;B24B37/04;B24D7/12;H01L21/304;H01L21/306
主分类号
B24B49/12
代理机构
代理人
主权项
地址
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