Frequency stabilization method of semiconductor laser, frequency-stabilized light source and laser module

摘要

A frequency stabilization method for a semiconductor laser (301) comprising the steps of: injecting an output light beam from a semiconductor laser (301) into an optical resonator (304); modulating the temperature of said optical resonator (304) by a modulation signal; detecting the transmitted light beam through said optical resonator (304) to produce a first output signal; synchronously detecting said first output signal and said modulation frequency to produce a second output signal; controlling the oscillation frequency of the semiconductor laser (301) to keep said frequency at a given value using the second output signal as a signal showing an error in said oscillation frequency. <IMAGE>