发明名称 Apparatus for piece-by-piece development corresponding to large scale substrates
摘要 A piece-by-piece, passing type development apparatus corresponding to large scale substrates comprises a pipe for ejecting a developing solution and means for applying the developing solution ejected from the pipe onto a substrate as continuous fluid.
申请公布号 US5753415(A) 申请公布日期 1998.05.19
申请号 US19940318517 申请日期 1994.10.05
申请人 CANON KABUSHIKI KAISHA 发明人 TAMURA, HIDEO
分类号 G02F1/1343;G03F7/30;(IPC1-7):G03F7/30 主分类号 G02F1/1343
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