| 摘要 |
PURPOSE: An optical flatness measuring apparatus is provided to facilitate the management of the quality of manufactured plates by removal in errors due to vibration during the transferring of the plates. CONSTITUTION: An optical flatness measuring apparatus comprise a light generator(10), an imaging lens(20), a light division unit(30), a first image sensor(40), a second image sensor(50), and a reflecting unit(60). The light generator emits the light on the surface of the plate. The imaging lens performs the image formation of light reflected from the surface of the plate. The light division unit disperses the light, passing through the imaging lens, in two or more directions. The first image sensor detects the height change of the surface of the plate. The reflecting unit reflects the light which is dispersed from the light division unit and flows in the second image sensor.
|
