APPARATUS FOR PELLICLE MEMBRANE AND METHODS FABRICATING PELLICLE USING THE SAME

摘要

PURPOSE: An apparatus and a method for manufacturing a pellicle film are provided to maximize an effect area of a pellicle film by controlling a spot of an external side of a membrane film. CONSTITUTION: A pellicle film is made by the rotation drive. A substrate support(110) includes a stage(120) which receives the material of the pellicle film. A gas flow shielding layer(130) is formed on a substrate support. A stage is formed with a protrusion or immersion type.