HYDROGEN SENSOR, PRODUCTION METHOD OF IT AND THE HYDROGEN CONSISTENCY MEASURING EQUIPMENT WHICH USES IT

摘要

PURPOSE: A hydrogen sensor, a manufacturing method thereof, and a hydrogen concentration measuring device using the same are provided to measure leakage and concentration of hydrogen gas by the change of light-transmission property according to the refractive index change of metal. CONSTITUTION: A hydrogen sensor comprises a planar optical waveguide(100) and a metallic foil(120). The planar optical waveguide comprises a lower clad(114) and an exposed core(116) on the top of a sub mount substrate(112). The metallic foil is laminated on the top of the lower clad with covering the exposed core. The metallic foil is made of the metal reacted with the hydrogen.