发明名称 Motion sensor and method of manufacturing the same
摘要 A micromachine includes a movable section formed of a conductor and a support section formed of a conductor, wherein the movable section and the support section are separated from each other, an insulating layer is provided on the conductor, a conductive layer is provided on the insulating layer, and the conductive layer is formed so as to straddle the movable section and the support section.
申请公布号 US7878060(B2) 申请公布日期 2011.02.01
申请号 US20070737410 申请日期 2007.04.19
申请人 SONY CORPORATION 发明人 YOSHIKAWA RYOICHI
分类号 G01P15/125;G01P9/04 主分类号 G01P15/125
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