发明名称 Method and device to reduce dark current in image sensors
摘要 A method to fabricate an image sensor includes providing a semiconductor substrate having a pixel area and a logic area, forming a light sensing element in the pixel area, and forming a first transistor in the pixel area and a second transistor in the logic area. The step of forming the first transistor in the pixel area and the second transistor in the logic area includes performing a first implant process in the pixel area and the logic area, performing a second implant process in the pixel area and the logic area, and performing a third implant process only in the logic area.
申请公布号 US7879639(B2) 申请公布日期 2011.02.01
申请号 US20070735226 申请日期 2007.04.13
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 KO CHUN-YAO;CHANG CHUNG-WEI;LIU HAN-CHI;WUU SHOU-GWO
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
主权项
地址