发明名称 |
MEMORY SEMICONDUCTOR DEVICE AND METHODS OF FABRICATING AND OPERATING THE SAME |
摘要 |
<p>PURPOSE: A memory semiconductor device, a manufacturing method thereof, and an operation method thereof are provided to improve the degree of integration by arranging word lines in a three dimension. CONSTITUTION: A ground selection structure and a string selection structure are separated from each other. A memory structure comprises sequentially laminated plurality of word lines. The memory structure is arranged between the ground and the string selection structure. A semiconductor pattern(65) covers the upper side and sidewall of the memory structure. The semiconductor pattern is connected to the ground and the string selection structure and crosses the word lines.</p> |
申请公布号 |
KR20110010045(A) |
申请公布日期 |
2011.01.31 |
申请号 |
KR20090121107 |
申请日期 |
2009.12.08 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
KIM, JI YOUNG;KANG L. WANG;PARK, YONG JIK;HAN JEONGHEE;AUGUSTIN JINWOO HONG |
分类号 |
H01L29/786;H01L21/28 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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