METHOD AND SYSTEM FOR ASSESSING RELIABILITY OF INTEGRATED CIRCUIT

摘要

PURPOSE: A method and a system thereof are provided to evaluate the reliability of an IC by including a reliability sensor. CONSTITUTION: A plurality of electric field effect transistors are operated under a first operating condition(510). The operating direction of at least one among a plurality of FETs is reversed during short time(520). The second operating condition of one among the plurality of FETs is measured within short time(530). A difference between the second operating condition and a reference operating condition is calculated(540). A reliability indicator is provided based on the difference between the second operating condition and the reference operating condition(550).