发明名称 |
PHOTORESIST STRIPPER COMPOSITION |
摘要 |
PURPOSE: A composition for removing aqueous photoresist is provided to effectively remove remaining photoresist without corrosion of a membrane. CONSTITUTION: A composition for removing aqueous photoresist contains: a compound selected from the group consisting of a compound of chemical formula 1 and quarternary ammonium hydroxides; a compound of chemical formula 2; a compound of chemical formula 3; one or more compounds selected from the group consisting of saccharides, sugar-aclohols, hydroxy cyalcoalkane compound of C3-10, aromatic hydroxy compound, acetylene alcohols, carboxylic acid compounds and anhydrides thereof; and deionized water. |
申请公布号 |
KR20110009809(A) |
申请公布日期 |
2011.01.31 |
申请号 |
KR20090067202 |
申请日期 |
2009.07.23 |
申请人 |
DONGWOO FINE-CHEM CO., LTD. |
发明人 |
YOO, KYOUNG WOOK;SUNG, SHI JIN;MYUNG, JUNG JAE;CHOI, KYUNG MI |
分类号 |
G03F7/42 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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