发明名称 IMPRINT LITHOGRAPHY TEMPLATE.
摘要 <p>An imprint lithography template is disclosed. In an embodiment, the template includes a patterned region to imprint a layer of imprintable medium, and an alignment mark for use in aligning the imprint template, the alignment mark configured such that imprintable medium is prevented from filling the alignment mark when the imprint template imprints the imprintable medium.</p>
申请公布号 NL2004932(A) 申请公布日期 2011.01.31
申请号 NL20102004932 申请日期 2010.06.21
申请人 ASML NETHERLANDS B.V. 发明人 WUISTER, SANDER;KRUIJT-STEGEMAN, YVONNE
分类号 G03F7/00 主分类号 G03F7/00
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