METHOD OF CURING DEFECTS IN SPIN-ON-GLASS

摘要

METHOD OF CURING DEFECTS IN A SPIN-ON-GLASS ABSTRACT 5 THE PRESENT INVENTION RELATES TO A METHOD OF CURING DEFECTS IN A SPIN-ON-GLASS MORE PARTICULARLY BUBBLE DEFECTS ON THE SPIN-ON-GLASS. THE ADVANTAGE OF THE PRESENT INVENTION IS ELIMINATE O REDUCE BUBBLE EFFECTS ON ALL THE LAYERS OF SOG I.E. THE FIRST LAYER OF SOG AND THE SECOND AND SUBSEQUENT LAYERS OF SOG. 10 15 20 25