METHOD FOR FABRICATING CU METAL WIRE AND AN ARRAY SUBSTRATE FOR LCD INCLUDING THE CU METAL WIRE

摘要

PURPOSE: A copper wire forming method and an array substrate for an LCD display device including a copper wire are provided to form a barrier layer comprised of a Cu2O in front side of the substrate and form copper pattern on upper part of the substrate, thereby providing reliable metal lines. CONSTITUTION: A Cu2O barrier layer(320) is evaporated in front side of the substrate(212). A copper metal layer is mounted on upper part of the CU2O barrier layer. A copper metal layer is etched. The Cu2O barrier layer and copper metal layer inside a same chamber is evaporated continuously. To form a Cu2O by reacting with a copper, the Cu2O barrier copper is formed through a reactive sputtering method injecting an inert gas including oxygen into the chamber.