发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
PURPOSE: A semiconductor device and a manufacturing method thereof are provided to improve the total performance of a semiconductor device by improving the electrical properties of wires. CONSTITUTION: A first wire(525a) comprises a first silicon wire region and a first metal wire region. A second wire comprises a second silicon wire region and a second metal wire region. The silicon wire region(510b) is located at the same level as the first silicon wire region and has specific resistivity less than the first silicon wire region.
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申请公布号 |
KR20110009982(A) |
申请公布日期 |
2011.01.31 |
申请号 |
KR20090067466 |
申请日期 |
2009.07.23 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
PARK, JONG MAN;YAMADA SATORU |
分类号 |
H01L21/336;H01L21/28 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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