Wafer fabrication apparatus having buffer modules and method for performing function thereof,申请号KR20080095234-传众专利搜索

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发明名称	Wafer fabrication apparatus having buffer modules and method for performing function thereof
摘要
申请公布号	KR101011637(B1)	申请公布日期	2011.01.28
申请号	KR20080095234	申请日期	2008.09.29
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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