| 摘要 |
PURPOSE: A cryo-pump and a monitoring method for the same are provided to implement an operating state of a cryo-pump, suitable for a vacuum device in which the cryo-pump is installed, using the cryo-pump controller. CONSTITUTION: A cryo-pump(10) discharges gas from a vacuum chamber of a vacuum device. The cryo-pump comprises a refrigerator(12), a cryo-panel(14) which is cooled with the refrigerator, and a controller which controls the operation frequency of the refrigerator to achieve the target temperature of the cryo-panel. The controller monitors the operation frequency for a first determination time when the operation frequency of the refrigerator reaches a first determination standard and for a second determination time shorter than the first determination time when reaching a second determination standard.
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