| 摘要 |
This invention discloses a cooling and damp-proof device which cools the substrate surface of the flat display substrate by using compressed gas, prevents the water content in air from coagulating drips and dropping onto the surface of the substrate. Said device includes: flow velocity/pressure controller for controlling the flow velocity/pressure of compressed gas; cold/heat gas generating unit for separating the provided gas into cold/heat gas flow; heater for heating the discharged cold gas flow generated by the cold/heat gas generating unit; cold gas flow nozzle for injecting cold gas flow on the surface of the FPD substrate to cool its surface, said cold gas is discharged from the cold/heat gas generating unit and its temperature is controlled by the heater; damp-proof unit for injecting heat flow around the ejected cold flow so as to achieve the goal of damp-proof for the FPD substrate. When the device of this invention is used in current heat flow device, the electric performance test of flat display substrate can be performed under the condition that the temperature is higher than that of the normal temperature or under the condition that the temperature is lower than that of the normal temperature, as a result, the reliability of the flat display substrate is enhanced. |
