Process for removing residues from a semiconductor substrate,申请号AU19980092135-传众专利搜索

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发明名称	Process for removing residues from a semiconductor substrate
摘要
申请公布号	AU9213598(A)	申请公布日期	1999.04.12
申请号	AU19980092135	申请日期	1998.09.01
申请人	OLIN MICROELECTRONIC CHEMICALS, INC.	发明人	M. LEE LOVE JR.;KENJI HONDA
分类号	C11D3/00;C11D7/10;C11D7/26;C11D7/32;C11D11/00;G03F7/42;H01L21/02;H01L21/304;H01L21/3213	主分类号	C11D3/00
代理机构		代理人
主权项
地址

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