发明名称 PROCESS FOR FORMING AN ELECTROACTIVE LAYER
摘要 There is provided a process for vacuum drying. The process includes the steps of: depositing a liquid composition containing a film-forming material and at least one solvent onto a workpiece to form a wet layer; placing the wet layer on the workpiece into a vacuum chamber including a condenser; and treating the wet layer at a controlled temperature in the range of -25 to 80°C and under an applied vacuum in the range of 10-6 to 1,000 Torr for a period of 1-100 minutes; wherein the condenser is maintained at a temperature at which the solvent will condense as a liquid at the applied vacuum.
申请公布号 WO2010104852(A3) 申请公布日期 2011.01.27
申请号 WO2010US26658 申请日期 2010.03.09
申请人 E. I. DU PONT DE NEMOURS AND COMPANY;CHESTERFIELD, REID, JOHN;BUTLER, JUSTIN;SANT, PAUL, ANTHONY 发明人 CHESTERFIELD, REID, JOHN;BUTLER, JUSTIN;SANT, PAUL, ANTHONY
分类号 H01L21/208;H01L21/302;H01L51/05 主分类号 H01L21/208
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