PURPOSE: A wafer holder is provided to increase the productivity of a semiconductor since being used for a wafer having large diameter. CONSTITUTION: A second frame body(7) forms a second fitting part with a concentric second outer circumference fitting part(14) and a concentric second inner circumference fitting part(15). The second outer circumference fitting part is comprised of a ring-shaped partition along the outer circumference of a second main part(13). A frame body(3) has a hollow structure and is comprised of a small metal plate.
