发明名称 PHOTOSENSITIVE RESIN COMPOSITION, AND PHOTOSENSITIVE RESIN COMPOSITION FILM AND MULTILAYER WIRING BOARD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a photosensitive resin composition film allowing formation of a film having superior heat resistance, in which a high-resolution pattern can be formed without producing undercut at patterning.SOLUTION: The photosensitive resin composition contains: (a) a polyimide, having at least one group selected from among the group consisting of a carboxyl group, a phenolic hydroxyl group, a sulfonic acid group and a thiol group at a terminal of the main chain; (b) an unsaturated bond-containing polymerizable compound; (c) an imidazole silane; and (d) a photopolymerization initiator.
申请公布号 JP2011017897(A) 申请公布日期 2011.01.27
申请号 JP20090162496 申请日期 2009.07.09
申请人 TORAY IND INC 发明人 MATSUMURA KAZUYUKI;KASUMI KENICHI
分类号 G03F7/037;G03F7/004;G03F7/075;H01L21/027 主分类号 G03F7/037
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