| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection apparatus for inspecting a ghost by using an actual optical system.SOLUTION: Since the ghost is inspected while a light emitting diode LED and an aperture AP are moved in a matrix in the X-axis and Y-axis directions and an imaging element CCD is moved in the Z-axis direction, relative positions of the light emitting diode LED, the aperture AP and the imaging element CCD to the optical system OPS for generating the ghost are obtained. |
