| 摘要 |
PROBLEM TO BE SOLVED: To provide a relatively compact wafer-branching and carrying device capable of branching and carrying a wafer at a high speed.SOLUTION: In the wafer-branching and carrying device 1, when a column 3 is turned intermittently by each of equal angles, a pickup means 10a and a port 6 are matched at each stop position. The pickup means 10a assumes a first position at which a wafer suction part 11 is withdrawn from the wafer W and a second position at which it gets close to the wafer W, and is energized towards the first position by an elastic member 12. Also, a depression means 20a is provided, with a head 21 capable of reciprocating between a standby position at which it is at an interval above from the pickup means 10a and a depression position at which it depresses the pickup means 10a. Since the head 21 undergoes reciprocating movement between the standby position and the depression position, each time the pickup means 10a is stopped, the pickup means 10a is moved from the first position to the second position and then is returned to the first position. |
