INSPECTION METHOD OF SUBSTRATE ASSEMBLY

摘要

PURPOSE: An inspecting method is provided to improve efficiency in the aspect of productivity by selecting inferior product through an align inspection process capable of remarkably reducing inspection time than an indentation impression inspection process. CONSTITUTION: A substrate assembly(10) is loaded in a first inspection table(50) and a second inspection table(60). An indentation impression inspection process is executed for the substrate assembly which is loaded to the first inspection table. An align inspection process is executed for the substrate assembly which is loaded to the second inspection table. The indentation impression inspection process for the substrate assembly of the first inspection table and a line inspection process for the substrate assembly of the second inspection table are simultaneously executed. The align inspection process uses an align camera(61).