Monolithic piezoactuator with transition region and safety layer, and use of the piezoactuator

摘要

A piezoactuator of monolithic multilayer design with an overall stack has at least one piezoelectrically active partial stack with piezoceramic layers arranged one above another and electrode layers arranged between these layers, at least one piezoelectrically inactive terminating region arranged above the partial stack, and at least one transition region arranged between the partial stack and the terminating region. The transition region has piezoceramic layers arranged one above another and electrode layers arranged between the piezoceramic layers and the piezoceramic layers and the electrode layers are arranged on one another such that there the electric fields that can be coupled into the piezoceramic layers are changed by electrical driving of the electrode layers successively in the transition region stack direction from piezoceramic layer to piezoceramic layer, and the partial stack has a safety layer towards the transition region, wherein a crack is preferably formed in the case of mechanical overloading.