发明名称 Device for cleaning substrates at carrier, has flexible and/or elastic cleaning device completely filling longitudinal channel in carrier and flexibly resting against walls of longitudinal channel
摘要 <p>The device (11) has an oblong pipe (18b) attached into a longitudinal channel (13) in a carrier (12). The pipe is liquid-conductively connected to a liquid connection to bring cleaning liquid inside the channel into the gaps for cleaning. The device relatively moves between the carrier and the pipe along a pipe longitudinal direction. A flexible and/or elastic cleaning device (23b) is provided in a pipe end area. The size of the cleaning device is larger as the cross section of the channel and/or the cleaning device completely fills the channel and flexibly rests against walls of the channel. An independent claim is also included for a method for cleaning longitudinal channels of a carrier.</p>
申请公布号 DE102009035342(A1) 申请公布日期 2011.01.27
申请号 DE20091035342 申请日期 2009.07.23
申请人 GEBR. SCHMID GMBH & CO. 发明人 HUBER, REINHARD
分类号 B08B3/02;H01L21/302 主分类号 B08B3/02
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