APPARATUS FOR PROCESSING SUBSTRATES

摘要

PURPOSE: An apparatus for processing substrates is provided to increase the efficiency of a process at each chamber by making the laminated chamber module level. CONSTITUTION: A processing chamber(100) provides a space in which a process is operated. A lower chamber module(200) is located in lowest part of the processing chamber. A unit process performed in a lower chamber module. An upper chamber module(300) is laminated on the lower chamber module.