发明名称 ACID-TRANSFER RESIN COMPOSITION, PRODUCTION METHOD OF BIOCHIP, AND BIOCHIP
摘要 PROBLEM TO BE SOLVED: To provide an acid-transfer resin composition for achieving more accurate and proper polymer synthesis on a substrate, and to provide a method for producing a biochip, and the biochip.SOLUTION: The acid-transfer resin composition contains (A) a polymer and (B) a radiation-sensitive acid generator, wherein the acid generator (B) generates an acid having a sulfonyl anion in the structure, by irradiation with radiation, and the proportion of carbon atoms in the chemical structure of the sulfonyl anion with respect to the total number of atoms is not less than 30%. The method includes steps of: forming a first film by coupling a first compound having an acid dissociable group to a substrate; forming a second film by using the composition; exposing the second film to remove a protective group from the first film corresponding to an exposed portion; removing the second film; and coupling a second compound to the portion in the first film where the protective group is removed.
申请公布号 JP2011017798(A) 申请公布日期 2011.01.27
申请号 JP20090161206 申请日期 2009.07.07
申请人 JSR CORP 发明人 NISHIMURA YUKIO;NISHIKAWA KOJI;GOTO HIROFUMI
分类号 G03F7/004;C08F20/56;G01N33/543;G03F7/095;G03F7/40;H01L21/027 主分类号 G03F7/004
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