发明名称 ELECTRODE PROCESSING METHOD
摘要 PROBLEM TO BE SOLVED: To prevent burr from occurring when several electrodes which are formed on the surface of a workpiece, protruding from it, are cut for uniforming their height.SOLUTION: By the electrode processing method, a heading process is performed by moving a cutting edge 332 to a heading height position, moving a chuck table 52 from a workpiece carry-in/out area E1 to a workpiece processing area E2 with the cutting edge 332 being rotated, thereby allowing the cutting edge 332 to cut into the surface of the workpiece from one side of the several electrodes which are protruded from the surface and cut through toward the other side of them. Then a deburring process is performed by moving the cutting edge 332 to a deburring height position and horizontally moving the chuck table 52 from the workpiece carry-in/out area E1 to the workpiece processing area E2 with the cutting edge 332 being rotated in the direction opposite to that in the heading process and thereby allowing the cutting edge 332 to cut into the electrodes from the other side and cut through toward the opposite side of them.
申请公布号 JP2011018858(A) 申请公布日期 2011.01.27
申请号 JP20090164178 申请日期 2009.07.10
申请人 DISCO ABRASIVE SYST LTD 发明人 MORI TAKASHI;KAWASE MASAYUKI;MATSUDA TOMOHITO
分类号 H01L21/60 主分类号 H01L21/60
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