| 摘要 |
PROBLEM TO BE SOLVED: To provide a development device, a development method and a developer circulating method, which do not cause quality failures, have low running cost and facilitate process control.SOLUTION: The development device includes (I) a developer circulating system having a developing bath where development is performed, a developer circulating tank containing a developer, a means for supplying the developer in the developer circulating tank to the developing bath and a means for returning the developer to the developer circulating tank, after the developer in the developing bath is used for the development; (II) an ultrafiltration filter for separating the developer into filtrate and a concentrated liquid; (III) a filtrate/concentrated liquid circulating system, having an ultrafiltration concentrated liquid tank containing a part of the developer which is removed from the developer circulating tank; a means for supplying the developer in the ultrafiltration concentrated liquid tank to the ultrafiltration filter; a means for returning the concentrated liquid separated by the ultrafiltration filter to the ultrafiltration concentrated liquid tank; and a means for returning the filtrate separated by the ultrafiltration filter to the developer circulating system. |
