| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection device capable of preventing deterioration in the quantity of light to be detected.SOLUTION: The surface inspection device includes a light source section for emitting at least heat rays and ultraviolet radiation; an illumination section for irradiating the surface of a substrate to be inspected, having a prescribed repeated pattern with a linearly polarized light using the ultraviolet radiation; a detection section for detecting a polarized light component whose vibration direction crosses the linearly polarized light in the light reflected from the surface of the substrate to be inspected irradiated with the linearly polarized light; and an inspection section for inspecting the existence or the non-existence of defects, based on the polarized light component detected by the detection section. A polarizing plate 34 for acquiring the linearly polarized light or the polarized light component is disposed by a sealing member 36, on the optical path of the illumination section or the inspection section. Also, an ultraviolet light transmitting heat-ray absorbing film is formed on the surface of a transmission region of the ultraviolet radiation of the sealing member 36, and one of a heat-ray absorbing film, a laminated film of a heat ray reflection film and the heat ray absorption film, a laminated film of a thermally conductive film and the heat-ray absorbing film, and a laminated film of the heat-ray reflecting film and the thermally conductive film is formed at a peripheral region of the transmission region. |
