| 摘要 |
The invention relates to an optical scanning device (10) comprising: a spot generator (20) for generating a two-dimensional array (8) of radiation spots at lattice points Pmn=mT1+nT2 (m=1 to L1, n=1 to L2) where T 1 is a first lattice vector and T2 is a second lattice vector, and scanning means for scanning a sample (26) through the array of radiation spots in a scanning direction such that the radiation spots trace essentially equidistant lines (81, 82, 83) relative to the sample. According to the invention, the angle γ between the scanning direction and the first lattice vector T1 is at most as large as the angle between the scanning direction and the second lattice vector T2, and the ratio L1/L2 is less than 0.6. According to a preferred embodiment, L1 differs from Λ by less then 1.0 or L1 equals Λ with a tolerance of 10% or, Λ being defined by √2 D/R=(1+Λ2) Λ, D being the length of a lattice diagonal and R being the resolution. The invention further relates to an optical scanning method.
|
