发明名称 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>PURPOSE: A semiconductor device and a method for manufacturing the same are provided to increase drain-source leakage current by preventing the generation of punch-through. CONSTITUTION: A gate trench(119) is formed in an epitaxial layer which is arranged on the upper side of a substrate. A body(117) is formed in the epitaxial layer. A gate poly(127) is formed within the gate trench. A pre-metal dielectric pattern is formed to be in contact with a part of the uppermost face of the body. A metal layer is deposited on the entire surface of the substrate including the pre-metal dielectric pattern.</p>
申请公布号 KR20110008870(A) 申请公布日期 2011.01.27
申请号 KR20090066414 申请日期 2009.07.21
申请人 DONGBU HITEK CO., LTD. 发明人 LEE, KYU OK
分类号 H01L21/336;H01L29/78 主分类号 H01L21/336
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