| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method, capable of inspecting a semiconductor integrated circuit at higher speed, with a small scale, at low cost and higher accuracy.SOLUTION: In this inspection device 1, a clock signal CLK and a data signal DATA_OUT are fetched in the semiconductor integrated circuit (ASIC 2), and is then outputted as a feedback signal FB_OUT, to thereby perform inspection. The device 1 includes a delay processing part 8 for delaying the data signal DATA_OUT as much as a prescribed delay amount, and outputting it to ASIC 2; a delay control part 9 for setting the delay amount in the delay processing part 8, based on the feedback signal FB_OUT, and acquiring a delay amount when the feedback signal FB_OUT satisfies a prescribed condition; and a setup time/hold time calculating section 10 for calculating the setup time and the hold time for ASIC 2, based on the delay amount acquired by the delay control part 9. |
