发明名称 OPTICAL DEVICE, OPTICAL EQUIPMENT AND METHOD FOR MANUFACTURING OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an optical device suitably removing dust stuck to a substrate which transmits light.SOLUTION: The optical device includes: a substrate (40) which is provided with an insulation portion (44, 104) and transmits light; a first electrode (42, 102, 112, 42a) and a second electrode (42, 102, 112, 42b) which are provided on the substrate holding the insulation portion there between and transmit the light; and an output circuit (28) which outputs a voltage to the first electrode and the second electrode so as to change an electric field of a surface of the substrate. The first electrode and the second electrode has the same main component as that of the insulation portion, and electric resistivity is lower than the insulation portion.
申请公布号 JP2011019065(A) 申请公布日期 2011.01.27
申请号 JP20090162034 申请日期 2009.07.08
申请人 NIKON CORP 发明人 OKAZAKI MITSUHIRO;IWABORI KOICHIRO
分类号 H04N5/225;G03B11/00;G03B17/02;H04N101/00 主分类号 H04N5/225
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