| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate storing container for improving productivity in a substrate inspection process, and also to provide a substrate inspection apparatus including the substrate storing container.SOLUTION: The substrate storing container M and the substrate inspection apparatus equipped with the same are individually equipped with a cassette that stores a plurality of substrates S stacked vertically, is loaded vertically to a housing, and matches with the size of a substrate to be inspected. |
