Method of producing particles by physical vapor deposition in an ionic liquid

摘要

A method for forming a coating on an ionic liquid includes placing an ionic liquid on a surface of a substrate, thereby forming an ionic liquid coated substrate. The ionic liquid coated substrate is introduced into a physical deposition chamber having a physical deposition target. One or more materials are directed from the physical deposition target onto the ionic liquid of the ionic liquid coated substrate by physical vapor deposition to form a coating on the ionic liquid of the ionic liquid coated substrate.