ACCELERATED PARTICLE AND HIGH ENERGY RADIATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a monolithic sensor which is capable of withstanding incident accelerated particles and high energy radiation.SOLUTION: An accelerated electron detector includes an array of monolithic sensors in a CMOS structure, each sensor including a substrate (10), an epi layer (11), a p+ well (12) and n+ wells (13) which are separated from the p+ well (12) by the epi layer (11). Integrated in the p+ well are a plurality of NMOS transistors. The sensor also includes a deep n region (15) beneath the p+ well (12) which establishes within the epi layer a depletion layer so that carriers generated in the epi layer are caused to drift to the n+ well (13) on application of a biasing voltage charge. The detector has improved radiation hardness and it therefore suitable for the detection and imaging of accelerated electrons such as in electron microscopes.