TRANSFER CHAMBER FOR VACUUM PROCESSING SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a transfer chamber bottom which may be made thinner than conventional flat bottoms of transfer chambers of comparable size to provide savings in cost and weight.SOLUTION: The transfer chamber 203 for a substrate processing tool 201 includes a body 207 having sidewalls 215 adapted to couple to at least one processing chamber 17 and at least one load lock chamber 15. The body houses at least a portion of a robot 205 adapted to transport a substrate between the processing chamber and the load lock chamber. A lid 227 couples to and seals a top of the body of the transfer chamber. The transfer chamber also has a domed bottom 233 adapted to couple to and to seal a bottom portion of the body of the transfer chamber.